by Bohuslav Bobrik Bohuslav Bobrik
APPLICATION NOTE
Digital network visualization symbolizing semiconductor manufacturing

Clamp-On Ultrasonic Flow Meters Help Semiconductor Manufacturer BOE Standardize Water Measurement

Summary

Chip demand is at a record high today, driven further by the impact of the pandemic and the ever-increasing demand for digital technology, making the semiconductor industry one of the fastest-growing sectors. Panametrics was approached by an automation contractor on behalf of BOE, a leading manufacturer of LCD and OLED displays, to supply flow meters for a greenfield project manufacturing foldable OLED displays. Hundreds of flow meters were required across the various project milestones.

Application

Fig. 1: Water piping at a semiconductor manufacturing facility, where AquaTrans AT600 clamp-on ultrasonic flow meters are used.

FluidVarious water lines
Pipe SizeDN50 to DN1600 (2″ – 64″)
Pipe MaterialCS, SS, various plastic pipes
Process Temperature7 – 25 °C (44 – 77 °F)
Panametrics

Benefits:

  • Zero contamination risk
  • No interruption to operations
  • Low maintenance
  • No pressure drop
  • Long-term stability and drift characteristics
  • Bi-directional measurement

Challenge

The semiconductor industry has many water applications – from ultra-pure water used for cleaning, to cooling water for HVAC systems, to raw water and sewage water that is typically treated directly at the site’s own wastewater treatment plant. All of these applications require flow measurement so the customer can achieve better process control and meet reporting obligations to local authorities, so flow meters play an important role. The key requirements for both the automation contractor and the end customer, BOE, were: the ability to measure non-conductive media such as ultra-pure water; reliable and stable measurement for process control; easy installation and commissioning; maintenance-free operation; digital communication capability (HART); and versatility to fit a wide range of pipe sizes and materials.

Solution

Partnering with the Panametrics team, the customer selected AquaTrans AT600 clamp-on ultrasonic flow meters with 2 MHz, 1 MHz and 0.5 MHz transducers in a dual-traverse configuration for the best possible performance: 2 MHz transducers for pipe sizes up to DN50, 1 MHz for DN80 to DN800, and 0.5 MHz for DN850 and above. Between 2019 and 2021, BOE ordered more than 500 AT600 flow meters with HART protocol. The customer is satisfied with both the Panametrics technology and the measurement results, and Panametrics has since become an approved supplier for BOE.

Water piping in a semiconductor fab facility

Ultrasonic liquid flow meter Panametrics AquaTrans AT600

Datasheet (PDF) Panametrics AquaTrans AT600

Source: Panametrics Application Note PANA095AN (panametrics.com) — © Panametrics LLC. Localized and prepared by INTECH CONTROL, the official Panametrics representative for Slovakia and Hungary.